| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of irregular lines caused by the movement in the ultraviolet laser irradiation. SOLUTION: This device comprises a laser oscillator 3, which irradiates an ultraviolet laser L of the short wave length and makes an etching in a processing surface 2 of a processing object 1, a loudspeaker 5a, which is set between the laser oscillator 3 and the processing object 1 and provides the vibrations to a mirror 4 reflecting the ultraviolet laser L from the laser oscillator 3 to the processing surface 2 of the processing object 1, and an XY table 6, which moves the processing object 1 to the ultraviolet laser L. Thus, the ultraviolet laser L is moved on the processing surface 2, being vibrated, by the vibration of the mirror 4 caused by the loudspeaker 5a. |
