Radiation generation system for axial electron guns, e.g. for welding, evaporation or machining

摘要

System has a cathode (7), focussing electrodes (8) and an anode (9) in a separately evacuatable radiation generation chamber connected via flow resistances to separately evacuatable radiation guide and process chambers, so that different pressures exist in the chambers. Electron beam can be guided from generation system via an anode bore and the flow resistances to the processing point. Spaces (2,13) on both sides of the anode are connected via at least one opening (12) in addition to the anode bore.