| 摘要 |
PURPOSE: An apparatus for heating a chemical solution is provided to enlarge a life time of a chemical solution tank by exchanging and mending easily a heater. CONSTITUTION: A support member(20) is installed in an inside of a housing(1). A chemical solution tank(10) is supported by the support member(20). The chemical solution tank(10) is formed with a multitude of insertion hole(13). A supply line(12) and an exhaust line(11) are formed with one body. A heater(30) is inserted into the insertion hole(13). The heater(30) is formed with a halogen lamp. A support plate(80) is installed at one side of plates(60,61). The plates(60,61) are combined with the housing(1). A fixing member(50) having a wire(31) is fixed at one side of the heater(30).
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