| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-stage fly-eye lens device that can contribute to the improvement of the quality and yield of products together with the constitution of upper and lower lens units themselves by adjusting the misalignment of the lens units after the interval between the lens units is adjusted. SOLUTION: In the two-stage fly-eye lens device, the upper and lower lens units 2 and 3 having fly-eye lenses 11 are provided in two stages with an appropriate interval in between, and the interval between the upper and lower lens units 2 and 3 can be adjusted. In addition, the fly-eye lenses 11 of at least one of the upper and lower lens units 2 and 3 can be adjusted finely in the horizontal direction. COPYRIGHT: (C)2005,JPO&NCIPI |
