| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a substantially square unit cell with high reading accuracy when a unit cell shape constituting a two-dimensional code is formed using a laser lithography system. SOLUTION: When an object is marked with a two-dimensional code by means of a laser lithography system, the object is scanned in U-shape, as shown by an arrow, with a circular laser beam 3 having a diameter about one half of the length of one side of a unit cell, thus forming a substantially square exposure unit cell 5 where the non-irradiated part (constrict part) is reduced. COPYRIGHT: (C)2005,JPO&NCIPI
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