| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge plasma device capable of achieving long lifetime and improvement of reliability of an electron source to supply an electron into gas which has been filled in an airtight container. SOLUTION: This has the airtight container 1 in which the gas has been sealed, a pair of electrodes 2a, 2b for discharge in order to form the discharge plasma in a desired discharge plasma formation space 3 by applying an electric field to the gas, the electron source 10 which is arranged in the airtight container 1 and which supplies the electron into the gas, and a grid electrode 20 oppositely arranged to the electron source 10, and this is provided with a discharge plasma formation assisting device to assist formation of the discharge plasma in the discharge plasma formation space 3. Of the pair of the electrodes 2a, 2b for discharge, one electrode 2a for discharge is an anode electrode and the other electrode 2b for discharge is a cathode electrode, and potential relation of the grid electrode 20, the cathode electrode 2b, and the anode electrode 2a has been set so that the potential of the grid electrode 20 becomes higher than that of the cathode electrode 2b and lower than that of the anode electrode 2a. COPYRIGHT: (C)2007,JPO&INPIT
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