发明名称 SEMICONDUCTOR MEMORY
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a technology capable of stably forming an interconnection shape without widening an occupied area of the interconnection region, and stabilizing a driving current flowing the interconnection. <P>SOLUTION: The semiconductor memory comprises a first and a second interconnection regions mutually adjacently arranged through a power wiring part. The first interconnection region has a first interconnection 10a of a first pitch, a first outgoing interconnection 12a of a second pitch wider than the first pitch, and a first inclined interconnection 11a for connecting the first interconnection 10a and the first outgoing interconnection 12a and extending in an oblique direction at a memory cell array part. The second interconnection region has a second interconnection 10b of a first pitch, a second outgoing interconnection 12b of the second pitch, and a second inclined interconnection 11b for connecting the second interconnection 10b and the second outgoing interconnection 12b and extending in an oblique direction at a memory cell array part. The first and the second inclined interconnection 11a, 11b extend to an identical direction. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2007324299(A) 申请公布日期 2007.12.13
申请号 JP20060151539 申请日期 2006.05.31
申请人 TOSHIBA CORP 发明人 SAITO KAZUO
分类号 H01L21/8247;G03F1/00;G03F1/70;H01L21/3205;H01L21/336;H01L21/768;H01L23/52;H01L23/522;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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