| 摘要 |
<P>PROBLEM TO BE SOLVED: To make power supply to a ladder electrode stable. <P>SOLUTION: The electrode connection fixture 10 is used when an electrode 916 for discharge arranged in the vacuum treatment chamber is connected to a high-frequency power source arranged outside the vacuum treatment chamber by using a cable 13 for high-frequency power supplies having a core body 13a and a shield ground 13b for covering the core body 13a. The electrode connection fixture 10 has a mounting section 11 connected to the electrode 916 and a gripping section 12 to which a tip end section at the side of the electrode 916 of the core body 13a is connected. The mounting section 11 has a truncated cone shape having a cross-section nearly trapezoid expanding toward a side of the electrode 916 from a side of the gripping section 12, and a main body 11a mounted on the electrode 916. The gripping section 12 is extended along an extension direction of the core body 13a and comprises a chuck member 12a for grasping an outer-periphery surface at the tip end section of the core body 13a from at least two directions and a press member 12b for pressing the inner-periphery surface of the chuck member 12a against the outer-periphery surface at the tip end section of the core body 13a. <P>COPYRIGHT: (C)2008,JPO&INPIT |
