| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a light irradiation device expanding or condensing laser light fluxes using optical members by low expansion glass and simultaneously achieving suppression of the damage of the optical members caused by heat, and to provide a laser beam machining apparatus equipped therewith. <P>SOLUTION: Disclosed is a light irradiation device R provided with: dividing elements 2a, 2b dividing light from a light source A into a plurality of light fluxes; and optical members arranged at the respective light paths of the plurality of light fluxes LP1, LP2, LP3 divided by the dividing elements and including reflection elements 3a, 3b, 12, 22, 42 and concave mirrors 10, 20, 40, wherein, the plurality of light fluxes are emitted via the optical members. Also disclosed is a laser beam machining apparatus 100 equipped with the light irradiation device R. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
