| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a device, which allows a device part with a rectangular cross section formed on a substrate to have high-quality electrode films on all the surfaces including a first and a second principal surface, and a first and a second side face; and a film formation apparatus.SOLUTION: A film forming source 402 and a substrate holder 403 are arranged in a vacuum chamber 401. The substrate holder 403 supports a substrate 100 of which the front face 100A and the rear face 100B are exposed, being supported with a revolving shaft 404. Through control of the rotation angle of the revolving shaft, the substrate holder performs the inversion drive for inverting the substrate such that one of the front face and the rear face of the substrate faces the film forming source, and the tilt drive for tilting the substrate. |
