| 发明名称 |
ИСПАРИТЕЛЬНОЕ УСТРОЙСТВО ДЛЯ СУБЛИМИРОВАННЫХ МАТЕРИАЛОВ |
| 摘要 |
The vaporization arrangement (2) includes at least one pan (3) for receiving a material (4) to be vaporized. A heating device is provided with number of heating rods (5) that are placed above the pan. The heating rods are arranged in a housing formed by a lid and the pan, and supported at both sides in a support ring (6) made of a high-temperature ceramic. |
| 申请公布号 |
RU2004137526(A) |
申请公布日期 |
2006.06.10 |
| 申请号 |
RU20040137526 |
申请日期 |
2004.12.22 |
| 申请人 |
Эпплайд Филмс ГМбХ энд Ко. КГ (DE) |
发明人 |
КЛЕММ Гюнтер (DE);ГЕРЦОГ Йенс (DE);Д-р ЛОТЦ Ганс-Георг (DE) |
| 分类号 |
C23C14/24;C23C14/26;C23C14/28 |
主分类号 |
C23C14/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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