| 摘要 |
A method of investigating a sample using a charged-particle microscope, comprising the steps of:
- Providing a charged-particle microscope, having a particle-optical column;
- Using the particle-optical column to direct an imaging beam of charged particles at the sample;
- Irradiating the sample with the imaging beam, as a result of which a flux ("Photon Flux") of output radiation is caused to emanate from the sample;
- Examining at least a portion of said output radiation using a detector, which method comprises the following additional steps:
- Embodying said detector to comprise a Solid State Photo-Multiplier (1) that is connected to a power supply providing an adjustable electrical bias ("MPPC Bias");
- Adjusting said bias so as to adjust a gain value ("MPPC Gain") of the Solid State Photo-Multiplier;
- Matching said gain value to the magnitude of said flux, so as to cause the Solid State Photo-Multiplier to operate below its saturation threshold.
A Solid State Photo-Multiplier is also sometimes referred to as a Silicon Photo-Multiplier (SiPM), on-chip pixelated Avalanche Photodiode array (with shared/common detection circuitry), MPPC®, etc. |
