| 摘要 |
SOLUTION: An end effector includes first, second, third, fourth, fifth, sixth, and seventh substrate support pads. A method of handling a substrate includes engaging a peripheral edge of the substrate with the second, fifth and sixth substrate support pads. The method also includes moving the end effector by a first distance into a processing chamber of a substrate processing system. The method further includes disengaging the peripheral edge of the substrate from the second, fifth, and sixth substrate support pads. The method additionally includes moving the end effector by a second distance into the processing chamber of the substrate processing system, and engaging the peripheral edge of the substrate with the first, third, fourth and seventh substrate support pads.SELECTED DRAWING: Figure 4A |
