| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator that is small in size and has improved reliability.SOLUTION: An IC chip (vibrator chip) 1 includes a base substrate 2, a vibration piece 3 (vibration part), a cap 4, a cavity (housing space) 5, and a semiconductor circuit 61. The semiconductor circuit 61 includes a MOS transistor as an ESD protective element 6. The vibration piece 3 (vibration part) is electrically connected to the ESD protective element 6 to continuously prevent electrostatic breakdown. Reduction in size is achieved by assembling the semiconductor circuit 61 in the IC chip (vibrator chip) 1, compared to such a case where a vibration piece 3 and a semiconductor circuit 61 are separate chips.SELECTED DRAWING: Figure 3 |
