发明名称 CALCIUM FLUORIDE MEMBER, METHOD FOR PRODUCING SAME, AND METHOD FOR PRESSURE-BONDING CALCIUM FLUORIDE CRYSTAL
摘要 The calcium fluoride member includes a first member made from monocrystalline calcium fluoride and a second member made from monocrystalline or polycrystalline calcium fluoride. The first member and the second member is pressure-bonded together to form the calcium fluoride member.
申请公布号 US2016362814(A1) 申请公布日期 2016.12.15
申请号 US201615185566 申请日期 2016.06.17
申请人 NIKON CORPORATION 发明人 UEHARA Naoyasu;AZUMI Minako;SUZUKI Shitoka
分类号 C30B29/12;H01J61/30;C30B33/06 主分类号 C30B29/12
代理机构 代理人
主权项 1. A calcium fluoride member, comprising: a first member made from monocrystalline calcium fluoride; and a second member made from monocrystalline or polycrystalline calcium fluoride, the first member and the second member being pressure-bonded together to form the calcium fluoride member.
地址 Tokyo JP