发明名称 |
CALCIUM FLUORIDE MEMBER, METHOD FOR PRODUCING SAME, AND METHOD FOR PRESSURE-BONDING CALCIUM FLUORIDE CRYSTAL |
摘要 |
The calcium fluoride member includes a first member made from monocrystalline calcium fluoride and a second member made from monocrystalline or polycrystalline calcium fluoride. The first member and the second member is pressure-bonded together to form the calcium fluoride member. |
申请公布号 |
US2016362814(A1) |
申请公布日期 |
2016.12.15 |
申请号 |
US201615185566 |
申请日期 |
2016.06.17 |
申请人 |
NIKON CORPORATION |
发明人 |
UEHARA Naoyasu;AZUMI Minako;SUZUKI Shitoka |
分类号 |
C30B29/12;H01J61/30;C30B33/06 |
主分类号 |
C30B29/12 |
代理机构 |
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代理人 |
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主权项 |
1. A calcium fluoride member, comprising:
a first member made from monocrystalline calcium fluoride; and a second member made from monocrystalline or polycrystalline calcium fluoride, the first member and the second member being pressure-bonded together to form the calcium fluoride member. |
地址 |
Tokyo JP |