| 摘要 |
<p>A mass flow controller includes a leak preventor mechanism having grooves disposed on a valve seat within the gas supply line and/or a particle trap disposed between a control valve and the discharge part configured to prevent particles from being introduced into the control valve in case of backpressure. The mass flow controller further includes a controller body having a flow path for fluid flow, an inlet part for introducing the fluid into the flow path, and a discharge part for discharging the fluid from the flow path. A mass flow sensor is installed adjacent to the inlet part of the controller body and connects to the flow path for measuring a mass flow of the fluid passing through the flow path. The control valve is installed adjacent to the discharge part of the controller body and is connected to the flow path for adjusting the mass flow of the fluid passing through the flow path by operation of a valve controller that compares the mass flow measured by the mass flow sensor and a reference flow in order to control the control valve such that the mass flow of the fluid is equal to the reference flow.</p> |
