| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a uniformity correction module having movable blades which are at least partly immersed in a fluid and having a sufficiently small difference between a refractive index of each blade and a refractive index of the fluid to prevent a significant reflection and a refraction at a surface of each blade. <P>SOLUTION: A uniformity correction module for improving the uniformity of a radiation distribution in a rectangular illumination slit having two longer sides and two shorter sides, includes a plurality of movable blades arranged along each longer side of the illumination slit and a chamber containing a fluid. Here, the movable blades are at least partly immersed in the fluid, and the difference between a refractive index of each blade and a refractive index of the fluid is sufficiently small to prevent the significant reflection and the refraction at a surface of each blade. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
