发明名称 MANUFACTURE OF PEROVSKITE TYPE MULTIPLE OXIDE THIN FILM
摘要 PURPOSE:To provide a manufacturing method to obtain a perovskite type multiple oxide thin film directly on a substrate being a target without using such complicated processes as calcining, pulverizing and sintering from a material which may be a precursor of a perovskite type multiple oxide or its mixture. CONSTITUTION:From the precursor of the perovskite type multiple oxide, e.g. bis(oxalate)titanium oxide (IV) barium being one of barium titanate procursors, a barium titanate thin film is directly formed on the substrate by thermal plasma spray.
申请公布号 JPH059003(A) 申请公布日期 1993.01.19
申请号 JP19910183898 申请日期 1991.06.28
申请人 TOYO INK MFG CO LTD 发明人 SATO KEIICHI;NAKAMURA MASAKAZU;YOYOGI SHINICHI;MITSUYOSHI YUSUKE
分类号 C01B13/14;C23C4/12 主分类号 C01B13/14
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