| 摘要 |
<p>PURPOSE:To carry out an XY stage operation at a high speed without oscilla tion of guide rails by interposing dampers between each guide rail and a first member. CONSTITUTION:Two guide rails 5 are set so that each guide surface 501 with which a slider comes in contact, comes in an identical plane. The guide rails 5 are pressed onto a Y stage 1 by pressing mechanisms 10 while relative movement in the directions of X and Y is being permitted in a space interspaced with the Y stage 1. Set mechanisms 11 and plungers 12 are provided for the Y stage 1, and the guide rails 5 are positioned by allowing the plungers 12 to press each guide rail 5 onto each set mechanism 11. And dampers 13 are interposed between each guide rail 5 and the Y stage 1. By this constitution, accuracy is prevented from being deteriorated at the time of mounting the guide rails, and moreover, the XY stage operation can be carried out at a high speeds.</p> |
