MECHANISM FOR DETECTING END-POINT OF ETCHING,申请号JP19930273351-传众专利搜索

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发明名称	MECHANISM FOR DETECTING END-POINT OF ETCHING
摘要
申请公布号	JPH07130708(A)	申请公布日期	1995.05.19
申请号	JP19930273351	申请日期	1993.11.01
申请人	NEC CORP	发明人	TANAKA MORIMITSU
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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