| 摘要 |
PURPOSE: To obtain a radiation sensitive resin compsn. capable of effectively suppressing the occurrence of scum, excellent in developability and having high resolution and a satisfactory focus allowance by incorporating an alkali- soluble resin and a specified 1, 2-quinonediazido compd. CONSTITUTION: This radiation sensitive resin compsn. contains an alkali-soluble resin and a 1, 2-quinonediazido compd. represented by the formula, wherein each of X1 -X20 and Y1 -Y4 is H, alkyl, alkoxyl or a group represented by-OD (D is H or an org. group contg. a 1, 2-quinonediazido group), at least one of X1 -X5 , at least one of X6 -X10 , at least one of X11 -X15 , at least one of X16 -X20 and at least one of Y1 -Y4 are groups represented by-OD and at least one of plural D's of the groups represented by-OD is an org. group contg. a 1, 2- quinonediazido group. |
