| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular speed detecting device which can be small-sized, which can enhance the efficiency of detection by arranging a detection electrode in the vicinity of an end part of a comb tooth part of a vibration exciting electrode so as to detect a surface acoustic wave that does not broaden so that the amplitude thereof can be prevented from decreasing, and which can decrease the space between the exciting electrode and a reflector. SOLUTION: An angular speed detecting device comprises vibration exciting electrodes 11, 12 which are arranged on the surface of a planar piezoelectric substrate 10, extending in the Y-axial direction, for generating a surface acoustic wave progressing in the X-axial direction orthogonal to the Y-axial direction, reflectors 13, 14 spaced from the exciting electrodes 11, 12 in the X-axial direction, for reflecting the surface acoustic wave, and detection electrodes 15, 16 arranged in the vicinity of one end of the electrodes 11, 12, which extends in the Y-axial direction. Since the detection electrodes 15, 16 are arranged in the vicinity of one end part of the electrodes 11, 12, the detecting efficiency can be enhanced without the surface acoustic wave being broadened so as to decrease its amplitude, and the space between the electrodes 11, 12 and the reflectors 13, 14 can be decreased, thereby it is possible to make the device small-sized as a whole. |
