发明名称
摘要 There are provided a tuning fork vibrator (10) well-balanced in between legs, a vibrating gyroscope using the vibrator, an electronic apparatus using the vibrator, and a manufacturing method of the vibrator. A tuning fork vibrator (10) includes a long plate-like vibration unit (13) having one principal surface and the other principal surface, a base (14) disposed at one end of the other principal surface of the vibration unit in the longitudinal direction, and a slit (15) for dividing the vibration unit into two legs (16,17) constituting a tuning fork along the longitudinal direction symmetrically in the width direction of the vibration unit (13). The slit is formed so as to include a portion of the base close to the vibration unit. <IMAGE>
申请公布号 JP3791485(B2) 申请公布日期 2006.06.28
申请号 JP20020334328 申请日期 2002.11.18
申请人 发明人
分类号 G01C19/56;G01C19/5628;H01L41/08;H01L41/22;H01L41/338;H02N2/00 主分类号 G01C19/56
代理机构 代理人
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