| 摘要 |
PROBLEM TO BE SOLVED: To sense configuration of high reliability by arranging measurement points with high density on an irradiation region of a specimen, by imagery- inputting a reflected light from a measurement point of a specimen corresponding to an irradiation region illuminated with a lighting means, with an imagery means, and arranging a plurality of position detecting means obtaining detection data at imagery positions. SOLUTION: A specimen 101 is carried in the direction shown by an arrow 102. A laser light of high directivity and luminance is used as a light source. A light beam from the light source forms a light spot 106 as an irradiation region on the specimen 101, via a beam shaping optical system. A part of the light turns to a reflected light 107 and forms an image by an imagery lens 108 with a linear position sensor 109. Detection data corresponding to each spot out of a plurality of light spots 106 are obtained with individual position sensors 109. Thereby the height of the measurement point of the specimen 101 can be sensed. By installing the plurality of position sensors 109, height sensing of the plurality of detection points is enabled in parallel.
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