WAFER CARRYING METHOD AND WAFER CARRIER, WAFER STORING METHOD AND EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a wafer carrying method and a wafer carrier, and wafer storing method and equipment in which incomplete patterning, e.g. short circuit of an interconnect line, can be eliminated by preventing particles from falling onto the wafer surface and adhering thereto. SOLUTION: In a wafer cassette 11, a wafer is stored while being held under such a state as the direction normal to the wafer surface 13 is substantially perpendicular to the gravitational direction. Since apparent area of the wafer surface 13 is decreased when viewed from above the wafer, particles can be prevented from adhering to the wafer surface 13. COPYRIGHT: (C)2005,JPO&NCIPI