| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a porous electroconductive zirconia-based sintered compact which has a specific volume resistivity capable of removing static charge and preventing electrification although it is a porous sintered compact having perforated pores and being gas permeable; and a vacuum chuck member made of the same. <P>SOLUTION: The porous electroconductive zirconia-based sintered compact is a ZrO<SB>2</SB>-Y<SB>2</SB>O<SB>3</SB>-based zirconia-based sintered compact, characterized in that (a) the crystal phase of ZrO<SB>2</SB>comprises mainly tetragonal zirconia, (b) the molar ratio of Y<SB>2</SB>O<SB>3</SB>/ZrO<SB>2</SB>is within a range of 2/98 to 5/95, (c) titanium is contained in an amount of 4-10 wt.% expressed in terms of oxide, (d) the porosity is 20-50%, (e) the average perforated pore diameter is 0.5-3 μm, (f) the specific volume resistivity is 10<SP>7</SP>to 10<SP>10</SP>Ω×cm, and (g) the bending strength is ≥80 MPa. The vacuum chuck member is made of the zirconia-based sintered compact. <P>COPYRIGHT: (C)2007,JPO&INPIT |
