| 摘要 |
A unit and a method for measuring thickness of an organic film, and an organic film depositing apparatus having the same are provided to prevent plume from being generated from deposition material by using a blocking plate installed below a substrate attached to a substrate support in a deposition chamber. A unit for measuring thickness of an organic film comprises a container(510) formed with an opening(514) through which organic material is introduced. A plurality of detection members(530a) are provided in the container to measure the mount of the organic material introduced through the opening. A filter member(540) is disposed above the detection members to reduce the organic material attached to the detection members. The filter member includes a mesh having a net structure having a thin plate shape. The filter member rotates in the container. A support member(520) supports the detection members.
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