PARTICLE-OPTICAL ARRANGEMENT

摘要

A particle-optical arrangement composed of an electron microscopy system (3) and an ion beam processing system (7) comprises an objective lens (43) of the electron microscopy system, said lens having an annular electrode (59), which is a component of the electron microscopy system that is arranged closest to a position (11) of an object to be examined. A shielding electrode (81) is arranged between the annular electrode and a principal axis (9) of the ion beam processing system (7).