| 摘要 |
PROBLEM TO BE SOLVED: To provide electromechanical systems level resonators with improved electrical and mechanical energy conversion suitable for use in circuits such as wideband filters.SOLUTION: A resonator includes multiple electrodes. The resonator also includes a composite piezoelectric material. The composite piezoelectric material includes at least one layer of a first piezoelectric material and at least one layer of a second piezoelectric material. At least one electrode is coupled to a bottom of the composite piezoelectric material. At least one electrode is coupled to a top face of the composite piezoelectric material.SELECTED DRAWING: Figure 1 |
