| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, the catalyst-free substrate grown graphene, and a manufacturing device thereof. The manufacturing method of catalyst-free substrate grown graphene comprises the following steps: (a) preparing a substrate on which a substrate layer is formed; (b) supplying carbon-containing gas, and conducting rapid thermal chemical vapor deposition (RTCVD); and (c) growing graphene on the substrate layer without having a catalyst layer. |
