| 发明名称 |
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE, AND NONTRANSITORY COMPUTER READABLE MEDIUM STORING A PATTERN GENERATING PROGRAM |
| 摘要 |
According to one embodiment, a semiconductor device includes a stacked body of N (N is an integer of 2 or more) layers stacked on a semiconductor substrate and openings different in depth surrounded by the stacked body and separated from each other. |
| 申请公布号 |
US2016260731(A1) |
申请公布日期 |
2016.09.08 |
| 申请号 |
US201514748764 |
申请日期 |
2015.06.24 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
NAGAI Satoshi;YONEDA Eiji;MATSUNAGA Kentaro;SHO Koutarou |
| 分类号 |
H01L27/115;G06F17/50;H01L27/02 |
主分类号 |
H01L27/115 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor device, comprising:
a stacked body of N (N is an integer of 2 or more) layers stacked on a semiconductor substrate; and openings different in depth surrounded by the stacked body and separated from each other. |
| 地址 |
Minato-ku JP |
