发明名称 SEMICONDUCTOR APPARATUS
摘要 A semiconductor apparatus has a configuration in which multiple copper wiring layers and multiple insulating layers are alternately layered. A low-impedance wiring is formed occupying a predetermined region. A first wiring pattern includes multiple copper wiring members arranged in parallel with predetermined intervals in a first copper wiring layer, each of which has a rectangular shape extending in a first direction. A second wiring pattern includes multiple copper wiring members arranged in parallel with predetermined intervals in a second copper wiring layer adjacent to the first copper wiring layer, each of which has a rectangular shape extending in a second direction orthogonal to the first direction. The region occupied by the first wiring pattern and that occupied by the second wiring pattern are arranged such that they at least overlap. The first wiring pattern and the second wiring pattern are electrically connected so as to have the same electric potential.
申请公布号 US2016260672(A1) 申请公布日期 2016.09.08
申请号 US201615156926 申请日期 2016.05.17
申请人 ROHM CO., LTD. 发明人 MAEDE Jun
分类号 H01L23/532;H01L23/522;H01L23/528 主分类号 H01L23/532
代理机构 代理人
主权项 1. A semiconductor apparatus having a configuration in which a plurality of copper wiring layers and a plurality of insulating layers are alternately layered, and including wiring formed occupying a predetermined region, wherein the wiring includes: a first wiring pattern formed in a first copper wiring layer, including a plurality of copper wiring members which are formed in parallel with predetermined intervals, and each of which has a rectangular shape extending in a first direction; a second wiring pattern formed in a second copper wiring layer adjacent to the first copper wiring layer, including a plurality of copper wiring members which are formed in parallel with predetermined intervals, and each of which has a rectangular shape extending in a second direction orthogonal to the first direction; and multiple pads arranged to be electrically connected to each other via the wiring formed occupying the predetermined region, wherein the same electrical potential is formed on the multiple pads respectively, and wherein the region occupied by the first copper wiring pattern, the region occupied by the second copper wiring pattern, and the aforementioned predetermined region overlap, and wherein the first wiring pattern and the second wiring pattern are electrically connected to each other so as to have the same electric potential.
地址 Ukyo-ku JP