| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging apparatus capable of supplying a sufficient quantity of illumination light to an imaging object and picking up images in a short time.SOLUTION: An imaging apparatus includes a light source 13, a stage 12 where an imaging object 11 is placed and which is scanned in a prescribed direction, an illumination optical systems 14, 15, 16 and 17 for supplying light from the light source to the imaging object placed on the stage, an image formation optical system 19 and 20 for forming images of the imaging object illuminated by the illumination optical systems and a detection device 21 for detecting the images of the imaging object formed by the image formation optical systems. Each illumination optical system has a plurality of mirrors 15a, 15b and 15c arranged in prescribed positions and the plurality of mirrors have different tilts. An illumination area 18 constituted by a plurality of illumination areas where no gaps are found when viewed from a prescribed direction is formed on the surface of the imaging object.SELECTED DRAWING: Figure 1 |
