| 摘要 |
Provided is a measurement method, wherein a multi-layer substrate has a base substrate, an absorption layer, and a layer to be measured in this order, and the layer to be measured has one or a plurality of single layers to be measured, said method comprising: a step for applying incident light, including light with a wavelength shorter than a threshold wavelength, from the side on which the layer to be measured is located, measuring reflected light, and thereby acquiring 2n (where, n is the number of single layers to be measured included in the layer to be measured, and is an integer of 1 or more) or more reflected light-related values independent of each other at wavelengths equal to or shorter than the threshold wavelength; and a step for using the 2n or more reflected-light related values to calculate, with regard to the respective single layers to be measured included in the layer to be measured, values relating to the single layers to be measured. Used as the threshold wavelength is the maximum wavelength in a wavelength range in which the absolute value of a first order differential dk(λ)/dλ when an extinction coefficient k of the absorption layer is represented as a function k(λ) of a wavelength λ (in units of nm) becomes an extinction differential threshold value or less. |
