| 发明名称 |
METHODS FOR DEPOSITING A MONOLAYER ON A SUBSTRATE |
| 摘要 |
Methods and compositions for depositing a monolayer onto a surface of a substrate are described. The method can include contacting the surface with a vapor phase comprising a carbene source, and reacting a carbene group from the carbene source with a functional group on the surface, to obtain a covalently bound monolayer on the surface of the substrate. The carbene source can be a diazirine compound. The functional group on the surface can be a C—H containing group, a Si—H containing group, among others, or combinations thereof. The method can further involve removing physisorbed molecules from the surface of the substrate. |
| 申请公布号 |
US2016307747(A1) |
申请公布日期 |
2016.10.20 |
| 申请号 |
US201615130208 |
申请日期 |
2016.04.15 |
| 申请人 |
The University of Rochester |
发明人 |
Shestopalov Alexander;McGrath James;Li Xunzhi |
| 分类号 |
H01L21/02;C23C16/455 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for depositing a monolayer onto a surface of a substrate, comprising:
(a) contacting the surface with a vapor phase comprising a carbene source, and (b) generating a carbene group from the carbene source, whereby the carbene group reacts with the surface to obtain a covalently bound monolayer on the surface of the substrate. |
| 地址 |
Rochester NY US |
