INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To attain an inspection device and inspection method that include a simple structure and can cut down chores required for preparing for inspection.SOLUTION: An inspection device includes: a screw shaft that is freely rotatable; a slider that is engaged with the screw shaft and rectilinearly advances on an inspection object in a first direction by a slide operation; a rectilinear advance guide that non-rotatably guides the slider in the first direction; a probe that is attached to the slider to output a scan signal inspecting a part of the inspection object; and a rotary encoder that detects a rotation angle of the screw shaft to be rotated accompanied by the slide operation of the slider, and outputs a signal indicative of an amount of movement in the first direction of the slider or the probe from the rotation angle.SELECTED DRAWING: Figure 1