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发明名称
IC TRANSPORT MECHANISM
摘要
申请公布号
JPH04159917(A)
申请公布日期
1992.06.03
申请号
JP19900286464
申请日期
1990.10.24
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
ONO TAKESHI
分类号
B65G59/06;B65G47/08;B65G47/78;H01L21/677;H01L21/68;H05K13/02
主分类号
B65G59/06
代理机构
代理人
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