发明名称 ELECTRO-OPTICAL SYSTEM FOR GAUGING SURFACE PROFILES
摘要 <p>An electro-optical system (400) for gauging the surface profile (424) on a test object (426) includes an image sensor that detects radiation (428) naturally emanating from the test object surface. An attenuating medium (414) is provided to attenuate the radiation as a function of the distance that the radiation travels through the medium (414). The intensity values associated with the radiation across the surface enables the system (400) to quantitatively determine and gauge the surface profile. Inventive means (430, 432) and associated methodology are disclosed that enable the system to correct for optically generated errors in the resulting image where those errors are caused by the nature of the surface being gauged or the components of the gauging system.</p>
申请公布号 WO1994010532(A1) 申请公布日期 1994.05.11
申请号 US1993009943 申请日期 1993.10.13
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