IMPROVEMENT OF SURFACE OF FLUORINATED POLYIMIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for improving the surface of a fluorinated polyimide, capable of improving the mutual adhesive strength of the fluorinated polyimide layers to an extent required for their processing treatment and also improving the adhesive strength of the fluorinated polyimide layer to a metal film to an extent required for their processing treatment. SOLUTION: A fluorinated polyimide used as an organic optical material for optical communication is treated with the plasma of a gas mixture comprising <=25% of CF4 gas and the remaining amount of O2 gas to improve the interlayer adhesive strength of the fluorinated polyimide layers. The fluorinated polyimide used as an organic optical material for optical communication is also treated with the plasma of a gas mixture comprising approximately 50% of CF4 gas and the remaining amount of the O2 gas to improve the adhesive strength of the fluorinated polyimide layer to a Ti film.