FLUID PRESSURE SENSOR WITH CONTAMINANT EXCLUSION SYSTEM

摘要

A variable capacitance fluid pressure sensor (10) of the type which includes a deflectable member (16) includes a contaminant exclusion system which protects the deflectable member (16) from both solid and non-solid fluid-borne contaminants. A system of traps disposed between the fluid inlet (20) to the sensor (10) and the deflectable member (16) prevents deposition of process vapors in the fluid on the deflectable member (16) and collects a variety of sizes of fluid-borne solid contaminants remote from the diaphragm (16).