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经营范围
发明名称
Plasmabearbeitungsgerät
摘要
申请公布号
DE69318480(D1)
申请公布日期
1998.06.18
申请号
DE19936018480
申请日期
1993.06.22
申请人
NIPPON TELEGRAPH AND TELEPHONE CORP., TOKIO/TOKYO, JP
发明人
NISHIMURA, HIROSHI, KANAGAWA, JP;ONO, TOSHIRO, KANAGAWA, JP;MATSUO, SEITARO, KANAGAWA, JP
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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