| 发明名称 |
METHOD FOR MANUFACTURING THIN FILM, AND THIN FILM ELEMENT |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film with stable quality at low cost. <P>SOLUTION: The method for manufacturing a thin film includes: a step of placing a substrate 20 in a raw material solution which is a material of a thin film formed on a first main surface 20a of the substrate 20; and a step of forming a thin film on the first main surface 20a of the substrate 20 by lighting the substrate 20 from the first main surface 20a side. <P>COPYRIGHT: (C)2011,JPO&INPIT |
| 申请公布号 |
JP2011111355(A) |
申请公布日期 |
2011.06.09 |
| 申请号 |
JP20090267907 |
申请日期 |
2009.11.25 |
| 申请人 |
RICOH CO LTD |
发明人 |
YAGI MASAHIRO;OTA HIDEKAZU |
| 分类号 |
C01B13/14;C23C26/00;H02N2/00 |
主分类号 |
C01B13/14 |
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