LASER ULTRASONIC INSPECTING DEVICE AND LASER ULTRASONIC INSPECTING SYSTEM

摘要

A laser ultrasonic inspecting device and a laser ultrasonic inspecting system are provided to selectively reduce data inputted to a defect detecting member for detecting a defect of an inspection target and to decrease a memory capacity for recording and analyzing the data. A surface-wave generating device irradiates laser light(216) onto a test object(211) to excite a surface wave. A surface-wave detecting device(213) detects a surface wave including a defect wave generated at a defect portion of the test object by irradiating the laser light onto the test object at a position apart by an established distance with respect to the laser irradiating position of the surface-wave generating device and detecting the reflected light of the laser light. A defect detecting device(214) records a surface-wave detection signal from the surface-wave detection device for a predetermined period from the time to synchronize with the output signal of the surface-wave generating device and detect the defect portion based on the surface-wave detection signal.