| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle classifier that converts the width of a certain electro-migration into particle diameter width and calculates the number of particles based on the measured number of charges using a mathematical method including a correction factor. SOLUTION: The particle classifier sucks charged aerosol from an aerosol supply section, classifies it by the electro-migration degree, detects the number of particles of a component to be measured with a detector, and calculates the number Na (per second) of particles within a particle diameter range sucked into the particle classifier using a relational expression (1): Na=(Imfce-e×nl×Nel)/(e×Ea×Ca)+Nes. Here, Nel is the number (per second) of large-diameter particles slipping into the detector, nl is an average valence of the large-diameter particles, Nes is the number (per second) of small-diameter particles, of the particles within a predetermined diameter range, flowing without being detected by the detector, Ca is an average charged rate of the small-diameter particles, Ea is an average valence of the small-diameter particles, and Imfce is measured current. COPYRIGHT: (C)2008,JPO&INPIT
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