| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device capable of jetting cleaning water onto the upper surface of a work-piece without weakening pressure of the cleaning water jetted from a nozzle.SOLUTION: A cleaning device includes: a holding table for holding a work-piece; a cleaning water jet nozzle for jetting cleaning water onto the upper surface of the work-piece held on the holding table; and cleaning water supply means for supplying the cleaning water to the cleaning water jet nozzle. The cleaning device also includes intermittent jetting means for intermittently jetting the cleaning water supplied by the cleaning water supply means from the cleaning water jet nozzle.SELECTED DRAWING: Figure 3 |
