发明名称 VIBRATION DEVICE, ELECTRONIC APPARATUS, AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibration device that allows a vibration element piece to be hermetically sealed within a package while preventing and reducing characteristic deterioration in the vibration element piece, and to provide an electronic apparatus and a mobile body that comprise such a vibration device and have excellent reliability.SOLUTION: In a vibration device 1 of the present invention, a junction 90 between a base 91 and a lid 92 includes a sealed portion 90b where a groove 921 formed on the lid 92 is sealed by welding. In the plan view, a sensor element piece 20 is arranged closer to one end side of the junction 90, and the sealed portion 90b is arranged at the other end side of the junction 90 relative to a sensor element piece 20. Their positions satisfy the relation of d1<d2, where d1 denotes a distance between the sensor element piece 20 and the one end of the junction 90, and d2 denotes a distance between the sensor element piece 20 and the sealed portion 90b.SELECTED DRAWING: Figure 6
申请公布号 JP2016180612(A) 申请公布日期 2016.10.13
申请号 JP20150059896 申请日期 2015.03.23
申请人 SEIKO EPSON CORP 发明人 AOKI SHINYA
分类号 G01C19/5628;H03H9/02 主分类号 G01C19/5628
代理机构 代理人
主权项
地址