Method for transferring substrate using vacuum roll-to-roll device

摘要

A vacuum roll-to-roll device includes: a first chamber; a second chamber neighboring the first chamber; a shutter disposed between the first chamber and the second chamber; a sealing member attached to the shutter; and a roll-type substrate which moves from the first chamber to the second chamber through the sealing member. A thickness of a lateral side of the roll-type substrate decreases in a direction toward an edge thereof.

主权项

1. A method for transferring a substrate by using a vacuum roll-to-roll device, comprising:
unrolling the substrate from a roller; transferring the substrate from a first chamber to a second chamber which is adjacent to the first chamber while a shutter between the first chamber and the second chamber is open; and closing the shutter so that a sealing member protruded from the shutter contacts upper and lower surfaces of the substrate, wherein a thickness of a lateral side of the substrate decreases to an edge thereof to define a tapered lateral side surface of the substrate, the tapered lateral side surface connecting upper and lower surfaces of the substrate; and wherein in a closed state of the shutter, the sealing member defines:
a first portion thereof contacting the upper surface of the substrate, the first portion defining a first thickness of the sealing member,a second portion thereof extending directly from the first portion toward the tapered lateral side surface of the substrate to directly contact the substrate, anda third portion thereof extending directly from the second portion and away from the substrate to be disposed outside the tapered lateral side surface of the substrate, the third portion defining a third thickness of the sealing member greater than the first thickness,wherein the second portion directly contacting the substrate defines a second thickness of the sealing member, the second thickness being greater than the first thickness and less than the third thicknesses, andthe second portion defining the second thickness faces and contacts the tapered lateral side surface of the substrate.