发明名称 CONTACT-VIA-CHAIN AS CORROSION DETECTOR
摘要 The invention relates to a detector (100) for determining a faulty semiconductor component (101), comprising a semiconductor component (101), a contact-via-chain (102) which is arranged laterally at a distance to the semiconductor component (101) and surrounds the semiconductor component (101) in some regions, a guard ring (103) which is arranged laterally at a distance to the semiconductor component (101), and an evaluation unit (104) which is arranged on the semiconductor component (101), characterised in that the evaluation unit (104) is configured to apply an electrical voltage to the contact-via-chain (102), in particular a permanent electrical voltage, to determine a resistance value of the contact-via-chain (102) and to generate an output signal, if the resistance value of the contact-via-chain (102) exceeds a threshold value.
申请公布号 WO2016180756(A1) 申请公布日期 2016.11.17
申请号 WO2016EP60286 申请日期 2016.05.09
申请人 ROBERT BOSCH GMBH 发明人 DIETZ, Franz;SCHNEIDER, Daniel
分类号 H01L21/66;H01L23/58 主分类号 H01L21/66
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