| 发明名称 |
MACHINE TABLE |
| 摘要 |
The present disclosure provides a machine table for supporting a substrate. The machine table includes a body; pin holes each penetrating through the body in a thickness direction; and support pins each received in the pin hole and movable up and down in the thickness direction, each support pin including a built-in cavity from which an antistatic liquid is sprayed onto an upper surface of the body. |
| 申请公布号 |
US2016341983(A1) |
申请公布日期 |
2016.11.24 |
| 申请号 |
US201514888055 |
申请日期 |
2015.03.23 |
| 申请人 |
BOE TECHNOLOGY GROUP CO., LTD. ;HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
WANG Haitao;WANG Wen;JIA Hongkang |
| 分类号 |
G02F1/13;H01L21/67;H01L21/687 |
主分类号 |
G02F1/13 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A machine table for supporting a substrate, comprising:
a body; pin holes each penetrating through the body in a thickness direction; and support pins each received in the pin hole and movable up and down in the thickness direction, each support pin including a built-in cavity from which an antistatic liquid is sprayed onto an upper surface of the body. |
| 地址 |
Beijing CN |
