发明名称 |
Test method of microstructure body and micromachine |
摘要 |
It is an object to provide a test method of a process, an electric characteristic, and a mechanical characteristic of a structure body in a micromachine without contact. A structure body including a first conductive layer, a second conductive layer provided in parallel to the first conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer is provided; an antenna connected to the structure body is provided; electric power is supplied to the structure body wirelessly through the antenna; and an electromagnetic wave generated from the antenna is detected as a characteristic of the structure body.
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申请公布号 |
US7808253(B2) |
申请公布日期 |
2010.10.05 |
申请号 |
US20060565135 |
申请日期 |
2006.11.30 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAGUCHI MAYUMI;IZUMI KONAMI;TATEISHI FUMINORI |
分类号 |
G01R27/32;B81C99/00;G01M99/00;G01R31/26 |
主分类号 |
G01R27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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